6. Molecular Spectroscopy Techniques Applied for Processing Plasma Diagnostics
نویسندگان
چکیده
منابع مشابه
Optical Techniques in Plasma Diagnostics
Recent developments in optical techniques for plasma diagnostics are critically reviewed. The primary emphasis is on plasma-induced emission and laser-induced fluorescence probes of radical and ionic concentrations and temperatures in low pressure discharges like those used in microelectronic fabrication. Other techniques such as optogalvanic, infrared, spontaneous and stimulated Raman, and mul...
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ژورنال
عنوان ژورنال: Journal of Plasma and Fusion Research
سال: 2004
ISSN: 0918-7928
DOI: 10.1585/jspf.80.767